Semiconductor Manufacturing Equipment
Our company specializes in the failure analysis of semiconductor manufacturing tools, from the gas box and gas distribution systems that include valves, filters, regulators, and mass flow controllers. These gas distribution systems feed into the process chambers with their complex system of shower heads, electrostatic chucks, and pedestals.
Extensive experience includes:
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Deposition tools including PVD, CVD, PECVD, ALD
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Etch tools including metal etch, polysilicon etch, and oxide etch
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Platforms, load-locks, transfer chambers, reaction chambers, and wafer handling robots
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Ambient and elevated temperature electrostatic chucks and pedestals
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Gas Distribution Systems including monometers, sensors, gas boxes, showerheads, and turbo pumps
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Gas Sticks including valves, regulators, filters, and mass flow controllers
