EBSD

Electron Backscattered Diffraction

This powerful technique enables surface texture to be measured. The orientation of the crystal lattice of each grain is determined in a detailed scan of the sample surface. Data supplied by the EBSD scan includes:

Grain orientation map
Grain size distribution
Inverse Pole Figure

Example:

The 111 orientation is preferred in the deposition of aluminum
metal on silicon wafers. The images show the results of an EBSD scan of an aluminum film on a 150mm silicon wafer.

Surface scan shows predominant 111 grain orientation.